Tracking control of a novel AFM scanner using signal transformation method

Title: Tracking control of a novel AFM scanner using signal transformation method
Creator: Bazaei, Ali; Yong, Yuen K.; Moheimani, S. O. Reza; Sebastian, Abu
Relation: 5th IFAC Symposium on Mechatronic Systems. Proceedings of the 5th IFAC Symposium on Mechatronic Systems (Cambridge, MA 13-15 September, 2010) p. 84-89
Publisher Link: http://dx.doi.org/10.3182/20100913-3-US-2015.00021
Publisher: International Federation of Automatic Control (IFAC)
Resource Type: conference paper
Date: 2010
Description: In this paper, we design feedback controllers for lateral and transversal axes of an AFM piezoelectric tube scanner. The controllers are constrained to keep the standard deviation of the measurement noise fed back to the displacement output around 0.1nm. It is shown that the incorporation of appropriate inner loops provides disturbance rejection capabilities and robustness against DC gain uncertainties, two requirements for satisfactory operation of signal transformation method. Simulations and experiments show significant improvement of steady-state tracking error with signal transformation, while limiting the projected measurement noise.
Subject: signal transformation; hybrid control system; atomic force microscope; sensor noise; control bandwidth; triangular waveform
Identifier: http://hdl.handle.net/1959.13/933483
Identifier: uon:11636
Identifier: ISBN:9783902661760
Language: eng
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